Environmental Engineering

ISO 14644-3:2005, Cleanrooms and associated controlled by ISO/TC 209

By ISO/TC 209

ISO 14644-3:2005 specifies try equipment for distinctive class of airborne particulate cleanliness and for characterizing the functionality of cleanrooms and fresh zones. functionality exams are special for 2 different types of cleanrooms and fresh zones: people with unidirectional stream and people with non-unidirectional circulation, in 3 attainable occupancy states: as-built, at-rest and operational. ISO 14644-3:2005 isn't acceptable to the size of goods or of strategies in cleanrooms or separative units.

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Additional info for ISO 14644-3:2005, Cleanrooms and associated controlled environments - Part 3: Test methods

Example text

4, respectively. 1 Preparatory calculations and evaluation Symbols and flow diagram of preparatory calculations and evaluation The symbols in this section are shown as follows: Cc is the challenge aerosol concentration upstream of the filter (particles/cm3); Ps is the maximum allowable integral MPPS (Most Penetrating Particle Size) penetration of the filter to be tested; PL is the standard leak penetration of the filter to be tested; K is the factor expressing how much PL may be larger than Ps; qVs is the standard value of sample flow rate, qVs = 472 cm3/s (= 28,3 l/min); qVa is the actual sample flow rate of the discrete-particle counter (cm3/s); Sr is the probe scan rate (cm/s); Dp is the probe dimension parallel to the scan direction (cm); Np is the expected number of particle counts which characterize the designated leak [particles]; Npa is the actual number of particle counts which characterize the designated leak [particles]; Ca is the observed acceptable count [particles]; Ts is the sample acquisition time (s); Tr is the sustained residence time (s).

2. A smaller value of Np will allow faster scanning or allow lower upstream concentration. a) If false counts are negligible, the pair, Ca = 0, Np = 3,7 should be selected. b) If false counts are not negligible, a value for Ca W 1 should be selected. 5) [18] Np Sr should not be higher than 8 (cm/s). 5). 5 a) Sustained residence time, Tr, and Npa and Ca for Tr Selection of sustained residence time, Tr (s) Any observed counts greater than Ca, should be cause for stationary re-measuring in sustained residence time Tr.

The measurement of discharge time is performed to evaluate the efficiency of eliminating static charges using ion generators. Measurement of offset voltage is performed to evaluate imbalance of positive and negative ions in the ionized airflow from ion generators. An imbalance of ions can result in undesirable residual voltage. 42 Copyright International Organization for Standardization Reproduced by IHS under license with ISO No reproduction or networking permitted without license from IHS © ISO 2005 – All rights reserved Not for Resale ISO 14644-3:2005(E) These measurements are performed using conductive monitoring plates, an electrostatic voltmeter, and a timer and power source.

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